NUCLEAR-REACTIONS AS A PROBE OF FLUORINE CONTENT IN SNO2-F THIN-FILMS

The resonant nuclear reaction technique has been applied to the determination of fluorine content in SnO2 thin films prepared by spray pyrolysis. Gamma-rays from the nuclear reaction F-19(p,alpha-gamma)O-16, which presents a narrow resonance at a 340 keV proton bombarding energy, were observed. The excitation curves obtained indicate the fluorine concentration and distribution in the sample. The interface between the film and the substrate is also clearly marked. Auger electron spectroscopy was used as an alternative technique to observe the fluorine, but it was very difficult to detect. The reason for this difficulty is assumed to be electron-induced desorption of fluorine atoms.