NONLEAKY OPTICAL WAVE-GUIDES IN KNBO3 BY ULTRALOW DOSE MEV HE ION-IMPLANTATION

被引:37
作者
STROHKENDL, FP
FLUCK, D
GUNTER, P
IRMSCHER, R
BUCHAL, C
机构
[1] SWISS FED INST TECHNOL, INST QUANTUM ELECTR, CH-8093 ZURICH, SWITZERLAND
[2] FORSCHUNGSZENTRUM JULICH, ISI FORSCHUNGSZENTRUM, W-5170 JULICH 1, GERMANY
关键词
D O I
10.1063/1.105724
中图分类号
O59 [应用物理学];
学科分类号
摘要
Planar optical waveguides in single crystals of KNbO3 were produced by 1 and 2 MeV He ion implantation with doses between 5 X 10(13) and 5 X 10(14) cm-2. We observe nonleaky waveguiding due to an implantation induced increase of n(c), the smallest of the three refractive indices of KNbO3. For 2 MeV He ions and a dose of 10(14) cm-2 waveguides with typical propagation losses of approximately 3 dB/cm have been fabricated. The possibility of producing nonleaky waveguides by ultralow dose implantation promises the creation of complicated channel waveguide structures within minutes.
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页码:3354 / 3356
页数:3
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