SUBNANOSECOND TIMING WITH ION-IMPLANTED DETECTORS

被引：9

作者：

RIJKEN, HA ^{[1
]}

KLEIN, SS ^{[1
]}

JACOBS, W ^{[1
]}

TEEUWEN, LJHGW ^{[1
]}

DEVOIGT, MJA ^{[1
]}

BURGER, P ^{[1
]}

机构：

[1] CANBERRA SEMICOND NV, B-2250 OLEN, BELGIUM

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 64卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(92)95479-B

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The energy resolution of ion-implanted charged particle detectors may be improved by decreasing the thickness of the implanted detector window to minimize energy straggling. Because of the resistance of this layer, however, the timing depends on the position of entry. Two solutions to this conflict between energy resolution and time resolution are studied: evaporating a very thin aluminum layer on the detector window and fabricating a rectangular detector. Both solutions are shown to be successful with a total time resolution in the low subnanosecond region (< 200 ps).

引用

页码：272 / 276

页数：5

共 14 条

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