MICROMACHINED CAPACITIVE ACCELEROMETER

被引：8

作者：

GERLACHMEYER, UE

机构：

[1] Electronic Systems Department, Battelle-Institut e.V., D-6000 Frankfurt am Main 90

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1991年 / 27卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(91)87050-D

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A capacitive accelerometer has been fabricated from Si 110 wafers using the silicon micromachining technique. The sensor basically consists of an elastically suspended plate between two fixed capacitor plates, forming a differential capacitor. The central plate is equipped with several slits, which reduces the air damping and enhances the dynamic behaviour. A sensor with a sufficient number of slits detects accelerations up to 1000 Hz with a signal deviation of less than 10%, while a sensor with no slits reaches the same deviation already around 50 Hz. The experimental data have been fitted with the theoretical curve, and the damping and resonance frequency are determined for different numbers of slits.

引用

页码：555 / 558

页数：4

共 6 条

[1]

ANGELL JB, 1983, SCI AM, V6, P36

[2] BATCH-FABRICATED SILICON ACCELEROMETER [J].

ROYLANCE, LM ;

ANGELL, JB .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) :1911-1917

[3] A MICROMECHANICAL CAPACITIVE ACCELEROMETER WITH A 2-POINT INERTIAL-MASS SUSPENSION [J].

RUDOLF, F .

SENSORS AND ACTUATORS, 1983, 4 (02) :191-198

[4]

RUDOLF F, 1985, 18 CTR SUISS EL MICR

[5]

SAUTER F, 1966, DIFFERENTIALGLEICHUN, V1070, P17

[6] DESIGN OPTIMIZATION FOR CANTILEVER-TYPE ACCELEROMETERS [J].

SEIDEL, H ;

CSEPREGI, L .

SENSORS AND ACTUATORS, 1984, 6 (02) :81-92

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