CDS-CU INTERFACE FORMATION - A MICROSCOPIC STUDY OF THE INTER-DIFFUSION AND CHEMICAL PROCESSES

被引：8

作者：

STOFFEL, NG ^{[1
]}

DANIELS, RR ^{[1
]}

MARGARITONDO, G ^{[1
]}

BRUCKER, CF ^{[1
]}

BRILLSON, LJ ^{[1
]}

机构：

[1] XEROX CORP, WEBSTER RES CTR, ROCHESTER, NY 14644 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 03期

关键词：

D O I：

10.1116/1.571634

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：701 / 704

页数：4

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