FABRICATION OF SINGLE-DOMAIN MAGNETIC PILLAR ARRAY OF 35 NM DIAMETER AND 65 GBITS/IN(2) DENSITY

被引：54

作者：

KRAUSS, PR

FISCHER, PB

CHOU, SY

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587630

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3639 / 3642

页数：4

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