FABRICATION OF SILICON MOS DEVICES USING X-RAY LITHOGRAPHY

[1] BERNACKI SE, 1974, 6TH P INT C EL ION B

[2] BERNACKI SE, THESIS HARVARD U

[3] BRAULT RC, 1974, 6TH P INT C EL ION B

[4] COHEN RA, 1973, AD7698574 DDC MASS I

[5] COSSLETT VE, 1960, XRAY MICROSCOPY, P375

[6] Fay B., 1973, Optics Communications, V9, P424, DOI 10.1016/0030-4018(73)90287-3

[7] FONG LH, 1970, AUST J PHYS, V23, P17

[8] EFFICIENCY OF PRODUCTION OF CHARACTERISTIC X-RADIATION IN THICK TARGETS OF A PURE ELEMENT [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1961, 78 (505): : 1206 - &

[9] MEASUREMENTS OF K,L AND M SHELL X-RAY PRODUCTION EFFICIENCIES [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1968, 1 (04) : 425 - &

[10] ANGULAR DISTRIBUTION OF CHARACTERISTIC X RADIATION + ITS ORIGIN WITHIN SOLID TARGET [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1964, 83 (5333): : 435 - +

[1] BERNACKI SE, 1974, 6TH P INT C EL ION B

[2] BERNACKI SE, THESIS HARVARD U

[3] BRAULT RC, 1974, 6TH P INT C EL ION B

[4] COHEN RA, 1973, AD7698574 DDC MASS I

[5] COSSLETT VE, 1960, XRAY MICROSCOPY, P375

[6] Fay B., 1973, Optics Communications, V9, P424, DOI 10.1016/0030-4018(73)90287-3

[7] FONG LH, 1970, AUST J PHYS, V23, P17

[8] EFFICIENCY OF PRODUCTION OF CHARACTERISTIC X-RADIATION IN THICK TARGETS OF A PURE ELEMENT [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1961, 78 (505): : 1206 - &

[9] MEASUREMENTS OF K,L AND M SHELL X-RAY PRODUCTION EFFICIENCIES [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1968, 1 (04) : 425 - &

[10] ANGULAR DISTRIBUTION OF CHARACTERISTIC X RADIATION + ITS ORIGIN WITHIN SOLID TARGET [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1964, 83 (5333): : 435 - +