RF PLASMA DEPOSITION OF AMORPHOUS-SILICON FILMS FROM SICL4-H2

[1] AUGELLI V, 1979, 6TH P NATL C VAC SCI

[2] PLASMA PREPARATIONS OF AMORPHOUS SILICON FILMS [J]. THIN SOLID FILMS, 1978, 50 (MAY) : 57 - 67

[3] STRUCTURAL, OPTICAL, AND ELECTRICAL PROPERTIES OF AMORPHOUS SILICON FILMS [J]. PHYSICAL REVIEW B, 1970, 1 (06): : 2632 - &

[4] BRUNO G, 1979, 6TH P NATL C VAC SCI

[5] CARLSON DE, 1976, APPL PHYS LETT, V28, P672

[6] Loveland R. J., 1973, Journal of Non-Crystalline Solids, V13, P55, DOI 10.1016/0022-3093(73)90035-5

[7] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS [J]. SOLID STATE COMMUNICATIONS, 1979, 29 (08) : 571 - 576

[8] MOTT NF, 1971, ELECTRONIC PROCESSES

[9] NEW AMORPHOUS SILICON-BASED ALLOY FOR ELECTRONIC APPLICATIONS [J]. NATURE, 1978, 276 (5687) : 482 - 484

[10] PLATTNER RD, 1979, P PHOTOVOLTAIC SOLAR

[1] AUGELLI V, 1979, 6TH P NATL C VAC SCI

[2] PLASMA PREPARATIONS OF AMORPHOUS SILICON FILMS [J]. THIN SOLID FILMS, 1978, 50 (MAY) : 57 - 67

[3] STRUCTURAL, OPTICAL, AND ELECTRICAL PROPERTIES OF AMORPHOUS SILICON FILMS [J]. PHYSICAL REVIEW B, 1970, 1 (06): : 2632 - &

[4] BRUNO G, 1979, 6TH P NATL C VAC SCI

[5] CARLSON DE, 1976, APPL PHYS LETT, V28, P672

[6] Loveland R. J., 1973, Journal of Non-Crystalline Solids, V13, P55, DOI 10.1016/0022-3093(73)90035-5

[7] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS [J]. SOLID STATE COMMUNICATIONS, 1979, 29 (08) : 571 - 576

[8] MOTT NF, 1971, ELECTRONIC PROCESSES

[9] NEW AMORPHOUS SILICON-BASED ALLOY FOR ELECTRONIC APPLICATIONS [J]. NATURE, 1978, 276 (5687) : 482 - 484

[10] PLATTNER RD, 1979, P PHOTOVOLTAIC SOLAR