MANUFACTURE AND EXAMINATION OF VARIOUS SPIN-ON GLASS-FILMS WITH RESPECT TO THEIR HUMIDITY-SENSITIVE PROPERTIES

被引：14

作者：

LIN, J

HEURICH, M

OBERMEIER, E

机构：

[1] Microsensor Technology, Technical University of Berlin, Berlin

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1993年 / 13卷 / 1-3期

关键词：

D O I：

10.1016/0925-4005(93)85335-8

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

SiO2 films produced by the sol-gel method were optimized with respect to their pore size and pore distribution so that these films are suitable for use as a basic material for thin-film humidity sensors. A capacitive humidity sensor is described which is distinguished by good reversibility, high sensitivity, good linearity, short response time (< 10 s) and low cross-sensitivity towards other gases (SO2, CO2, NH3).

引用

页码：104 / 106

页数：3