PLASMA POLYMERIZATION OF ETHYLENE AND THE SERIES OF FLUOROETHYLENES - PLASMA EFFLUENT MASS-SPECTROMETRY AND ESCA STUDIES

被引：68

作者：

DILKS, A

KAY, E

机构：

[1] IBM CORP,RES LAB,SAN JOSE,CA 95193

[2] UNIV DURHAM,DEPT CHEM,DURHAM DH1 3LE,ENGLAND

来源：

MACROMOLECULES | 1981年 / 14卷 / 03期

关键词：

D O I：

10.1021/ma50004a074

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：855 / 862

页数：8

共 19 条

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CLARK, DT ;

DILKS, A .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1979, 17 (04) :957-976

[2] ESCA APPLIED TO POLYMERS .28. PLASMA POLYMERIZATION .3. ESCA INVESTIGATION OF POLYMERS SYNTHESIZED BY EXCITATION OF INDUCTIVELY COUPLED RF PLASMAS IN PERFLUOROCYCLOHEXA-1,3-DIENES AND 1,4-DIENES, AND IN PERFLUOROCYCLOHEXENE [J].

CLARK, DT ;

SHUTTLEWORTH, D .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1980, 18 (02) :407-425

[3] ESCA APPLIED TO POLYMERS .25. PLASMA POLYMERIZATION - ESCA INVESTIGATION OF POLYMERS SYNTHESIZED BY EXCITATION OF INDUCTIVELY COUPLED RF PLASMAS IN ISOMERIC DIFLUOROETHYLENES [J].

CLARK, DT ;

SHUTTLEWORTH, D .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1979, 17 (05) :1317-1329

[4]

CLARK DT, 1975, J MACROMOL SCI R M C, VC 12, P191

[5]

DILKS A, UNPUBLISHED

[6]

DILKS A, 1979, ACS S SER

[7]

DILKS A, ELECTRON SPECTROSCOP, V4

[8]

IVANOV SI, 1979, EUR POLYM J, V14, P611

[9] METAL-CONTAINING FLUOROPOLYMER FILMS PRODUCED BY SIMULTANEOUS PLASMA-ETCHING AND POLYMERIZATION - EFFECTS OF HYDROGEN OR OXYGEN [J].

KAY, E ;

DILKS, A ;

SEYBOLD, D .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (11) :5678-5687

[10]

KAY E, 1976, VIDE, V183, P89

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