NEW PIEZOELECTRIC COMPOSITES FOR ULTRASONIC TRANSDUCERS

被引:22
作者
LUBITZ, K [1 ]
WOLFF, A [1 ]
PREU, G [1 ]
STOLL, R [1 ]
SCHULMEYER, B [1 ]
机构
[1] DU PONT DE NEMOURS GMBH,NEU ISENBURG,GERMANY
关键词
D O I
10.1080/00150199208217972
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The combination of photolithographic processes and green ceramic body structuring methods allow the fabrication of 1-3 or 2-2 composites with very fine structures and a free geometric design. Two suitable methods - named lost mould resp. jet machining - are presented with their potential to make new transducer geometries in the frequency range greater-than-or-equal-to 5 MHz.
引用
收藏
页码:21 / 26
页数:6
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