EPITAXIAL PBTIO3 THIN-FILMS GROWN BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION

被引:86
作者
DEKEIJSER, M [1 ]
DORMANS, GJM [1 ]
CILLESSEN, JFM [1 ]
DELEEUW, DM [1 ]
ZANDBERGEN, HW [1 ]
机构
[1] DELFT UNIV TECHNOL,NATL CTR HREM,2628 AL DELFT,NETHERLANDS
关键词
D O I
10.1063/1.104792
中图分类号
O59 [应用物理学];
学科分类号
摘要
Epitaxial PbTiO3 layers have been grown on (001)SrTi03 substrates by organometallic chemical vapor deposition using the precursors titanium-iso-propoxide and tetra-ethyl-lead. The growth temperature for these films was around 700-degrees-C. The epitaxial nature of c-axis-oriented PbTiO3 is confirmed by Rutherford backscattering spectrometry, x-ray diffraction, including pole figure analysis, and high-resolution electron microscopy (HREM). With HREM twinning has been observed.
引用
收藏
页码:2636 / 2638
页数:3
相关论文
共 9 条
  • [1] THE GROWTH OF FERROELECTRIC OXIDES BY MOCVD
    BRIERLEY, CJ
    TRUNDLE, C
    CONSIDINE, L
    WHATMORE, RW
    AINGER, FW
    [J]. FERROELECTRICS, 1989, 91 : 181 - 192
  • [2] PREPARATION OF C-AXIS ORIENTED PBTIO3 THIN-FILMS AND THEIR CRYSTALLOGRAPHIC, DIELECTRIC, AND PYROELECTRIC PROPERTIES
    IIJIMA, K
    TOMITA, Y
    TAKAYAMA, R
    UEDA, I
    [J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (01) : 361 - 367
  • [3] METALORGANIC CHEMICAL VAPOR-DEPOSITION OF PBTIO3 THIN-FILMS
    KWAK, BS
    BOYD, EP
    ERBIL, A
    [J]. APPLIED PHYSICS LETTERS, 1988, 53 (18) : 1702 - 1704
  • [4] NAKAGAWA T, 1982, JPN J APPL PHYS, V21, P655
  • [5] PREPARATION OF C-AXIS-ORIENTED PBTIO3 THIN-FILMS BY MOCVD UNDER REDUCED PRESSURE
    OKADA, M
    TAKAI, S
    AMEMIYA, M
    TOMINAGA, K
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (06): : 1030 - 1034
  • [6] OKADA M, 1988, J CERAM SOC JPN, V96, P676
  • [7] OKUYAMA M, 1989, FERROELECTRICS, V63, P423
  • [8] CHARACTERIZATION OF MOCVD PBTIO3 THIN-FILMS
    SWARTZ, SL
    SEIFERT, DA
    NOEL, GT
    SHROUT, TR
    [J]. FERROELECTRICS, 1989, 93 : 37 - 43
  • [9] 1981, LANDOLTBORNSTEIN, V3, P77