MICROLENS FABRICATED BY THE PLANAR PROCESS

被引：20

作者：

SHIMADA, J

OHGUCHI, O

SAWADA, R

机构：

[1] NTT Applied Electronics Laboratories, Tokyo 180, Midori-cho 3-9-11, Musashino-shi

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1991年 / 9卷 / 05期

关键词：

D O I：

10.1109/50.79532

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel microlens is proposed that can be integrated on a laser-diode substrate by the planar process. A horizontal focusing lens, which is one component of this microlens, with a nearly diffraction-limited focusing spot is successfully fabricated. The relationship between fabrication errors and lens characteristics is quantitatively established by comparing lenses with various fabrication errors. Also, a laser diode integrated with the horizontal focusing lens is successfully fabricated without damage.

引用

页码：571 / 576

页数：6

共 8 条

[1] THIN-FILM LASER-TO-FIBER COUPLER [J].

BOIVIN, LP .

APPLIED OPTICS, 1974, 13 (02) :391-395

[2] OPTICAL-WAVEGUIDE LENSES [J].

HATAKOSHI, G ;

INOUE, H ;

NAITO, K ;

UMEGAKI, S ;

TANAKA, S .

OPTICA ACTA, 1979, 26 (08) :961-968

[3] CALCULATION AND EXPERIMENTAL-VERIFICATION OF TWO-DIMENSIONAL FOCUSING GRATING COUPLERS [J].

HEITMANN, D ;

ORTIZ, C .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1981, 17 (07) :1257-1263

[4] MICRO FRESNEL LENSES [J].

NISHIHARA, H ;

SUHARA, T .

PROGRESS IN OPTICS, 1987, 24 :1-37

[5]

SAWADA R, 1991, 4TH IEEE WORKSH MICR

[6]

SHIMADA J, 1990, 3RD OPT C OEC 90 CHI

[7] REACTIVE FAST-ATOM BEAM ETCHING OF GAAS USING CL2 GAS [J].

SHIMOKAWA, F ;

TANAKA, H ;

UENISHI, Y ;

SAWADA, R .

JOURNAL OF APPLIED PHYSICS, 1989, 66 (06) :2613-2618

[8]

SHIRAE H, 1989, T IEICE C, V1, P352

← 1 →