STUDY OF ORGANIC FILMS BY USING TOTAL-REFLECTION OF X-RAYS

被引:2
作者
EMELYANOV, Y
KHATKO, V
LUNEVICH, A
GLOBA, I
机构
[1] Physical Technical Institute, Academy of Science of Belarus
关键词
D O I
10.1016/0379-6779(93)91224-P
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Amphiphilic polyamic acid films comprising 24, 50 and 74 monolayers were applied to silicon substrates by employing the Langmuir-Blodgett method. Their transformation into polyimide films was conducted by means of the stepwise heat treatment in a nitrogen atmosphere in the temperature range of approximately 300 to 600 K with a 25 K step width. In each annealing step the multilayer thickness and density were determined by using the method of X-ray reflectometry. It was shown that the decrease of the Langmuir-Blodgett film thickness in the course of heat treatment was associated with two processes: thermal imidation and removal of separated radicals from the volume.
引用
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页码:195 / 198
页数:4
相关论文
共 6 条
[1]  
ANDREYEVA MA, 1985, SURFACE, V4, P5
[2]  
Bessonov M. I., 1983, POLYIMIDES CLASS THE, P72
[3]  
BLINOV LM, 1988, USP FIZ NAUK+, V155, P443, DOI 10.1070/PU1988v031n07ABEH003573
[4]  
KAKIMOTO M, 1987, ACS SYM SER, V346, P484
[5]  
SINAISKI VM, 1974, DEVICES TECH EXP, V6, P5
[6]  
UEKITA M, 1988, MOL ELECTRONIC DEVIC, P531