THIN-FILM HERMETICITY - A QUANTITATIVE-ANALYSIS OF DIAMONDLIKE CARBON USING VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY

被引：14

作者：

ORZESZKO, S

DE, BN

WOOLLAM, JA

POUCH, JJ

ALTEROVITZ, SA

INGRAM, DC

机构：

[1] NASA,LEWIS RES CTR,CLEVELAND,OH 44135

[2] UNIVERSAL ENERGY SYST,DAYTON,OH 45432

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 08期

关键词：

D O I：

10.1063/1.341331

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4175 / 4180

页数：6

共 12 条

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[8]

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[10] VARIABLE ANGLE OF INCIDENCE SPECTROSCOPIC ELLIPSOMETRY - APPLICATION TO GAAS-ALXGA1-XAS MULTIPLE HETEROSTRUCTURES [J].

SNYDER, PG ;

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