TECHNOLOGY OF ION-BEAM SOURCES USED IN SPUTTERING

[1] BEATTIE JR, 1976, AIAA761011 PAP

[2] DISCHARGE CHAMBER OPTIMIZATION OF SERT 2 THRUSTER [J]. JOURNAL OF SPACECRAFT AND ROCKETS, 1968, 5 (07) : 795 - &

[3] BYERS DC, 1971, TMX67842 NASA TECH M

[4] COLLETT CR, 1972, NAS315523 NASA CONTR

[5] ISAACSON GC, 1976, AIAA761045 PAP

[6] ACCELERATOR-SYSTEM SOLUTIONS FOR BROAD-BEAM ION SOURCES [J]. AIAA JOURNAL, 1977, 15 (07) : 1025 - 1034

[7] KAUFMAN HR, 1961, TND585 NASA TECH NOT

[8] KAUFMAN HR, 1971, P S ION SOURCES FORM, P61

[9] KAUFMAN HR, 1962, 3RD P S ADV PROP CON, P3

[10] KAUFMAN HR, 1961, ELECTROSTATIC PROPUL, V5, P3

[1] BEATTIE JR, 1976, AIAA761011 PAP

[2] DISCHARGE CHAMBER OPTIMIZATION OF SERT 2 THRUSTER [J]. JOURNAL OF SPACECRAFT AND ROCKETS, 1968, 5 (07) : 795 - &

[3] BYERS DC, 1971, TMX67842 NASA TECH M

[4] COLLETT CR, 1972, NAS315523 NASA CONTR

[5] ISAACSON GC, 1976, AIAA761045 PAP

[6] ACCELERATOR-SYSTEM SOLUTIONS FOR BROAD-BEAM ION SOURCES [J]. AIAA JOURNAL, 1977, 15 (07) : 1025 - 1034

[7] KAUFMAN HR, 1961, TND585 NASA TECH NOT

[8] KAUFMAN HR, 1971, P S ION SOURCES FORM, P61

[9] KAUFMAN HR, 1962, 3RD P S ADV PROP CON, P3

[10] KAUFMAN HR, 1961, ELECTROSTATIC PROPUL, V5, P3