TEMPERATURE-DEPENDENCE OF STRESSES IN CHEMICAL VAPOR-DEPOSITED VITREOUS FILMS

[1] ABOAF JA, 1969, J ELECTROCHEM SOC, V116, P1731

[2] Bruckner R., 1970, Journal of Non-Crystalline Solids, V5, P123, DOI 10.1016/0022-3093(70)90190-0

[3] BRUCKNER R, 1970, J NONCRYST SOLIDS, V5, P176

[4] BURGER RM, 1969, FUNDAMENTALS SILICON, V1

[5] CHU TL, 1968, T METALL SOC AIME, V242, P532

[6] DIFFUSION MODELS FOR HOT PRESSING WITH SURFACE ENERGY AND PRESSURE EFFECTS AS DRIVING FORCES [J]. JOURNAL OF APPLIED PHYSICS, 1970, 41 (12) : 4798 - &

[7] STUDIES IN NEWTONIAN FLOW .2. THE DEPENDENCE OF THE VISCOSITY OF LIQUIDS ON FREE-SPACE [J]. JOURNAL OF APPLIED PHYSICS, 1951, 22 (12) : 1471 - 1475

[8] GELDSMITH N, 1967, RCA REV, V28, P153

[9] HOLLOWAY DJ, 1973, PHYSICAL PROPERTIES, pCH1

[10] KERN W, 1976, RCA REV, V37, P3

[1] ABOAF JA, 1969, J ELECTROCHEM SOC, V116, P1731

[2] Bruckner R., 1970, Journal of Non-Crystalline Solids, V5, P123, DOI 10.1016/0022-3093(70)90190-0

[3] BRUCKNER R, 1970, J NONCRYST SOLIDS, V5, P176

[4] BURGER RM, 1969, FUNDAMENTALS SILICON, V1

[5] CHU TL, 1968, T METALL SOC AIME, V242, P532

[6] DIFFUSION MODELS FOR HOT PRESSING WITH SURFACE ENERGY AND PRESSURE EFFECTS AS DRIVING FORCES [J]. JOURNAL OF APPLIED PHYSICS, 1970, 41 (12) : 4798 - &

[7] STUDIES IN NEWTONIAN FLOW .2. THE DEPENDENCE OF THE VISCOSITY OF LIQUIDS ON FREE-SPACE [J]. JOURNAL OF APPLIED PHYSICS, 1951, 22 (12) : 1471 - 1475

[8] GELDSMITH N, 1967, RCA REV, V28, P153

[9] HOLLOWAY DJ, 1973, PHYSICAL PROPERTIES, pCH1

[10] KERN W, 1976, RCA REV, V37, P3