EPITAXIAL ELECTROOPTICAL SRXBA1-XNB2O6 FILMS BY SINGLE-SOURCE PLASMA-ENHANCED METALORGANIC CHEMICAL-VAPOR-DEPOSITION

被引:19
作者
ZHU, LD
ZHAO, J
WANG, F
NORRIS, PE
FOGARTY, GD
STEINER, B
LU, P
KEAR, B
KANG, SB
GALLOIS, B
SINCLAIR, M
DIMOS, D
CRONINGOLOMB, M
机构
[1] NATL INST STAND & TECHNOL,GAITHERSBURG,MD 20899
[2] RUTGERS STATE UNIV,NEW BRUNSWICK,NJ 08854
[3] STEVENS INST TECHNOL,HOBOKEN,NJ 07030
[4] SANDIA NATL LABS,ALBUQUERQUE,NM 87185
[5] TUFTS UNIV,CTR ELECTROOPT TECHNOL,MEDFORD,MA 02155
关键词
D O I
10.1063/1.115419
中图分类号
O59 [应用物理学];
学科分类号
摘要
SrxBa1-xNb2O6 films have been epitaxially grown on MgO substrates by a single-source plasma-enhanced chemical vapor deposition (PE-CVD). Exceptionally high quality of the epitaxial films was observed as indicated by high-resolution synchrotron x-ray diffract ion imaging. The films exhibit waveguiding behavior with values of refractive index and the linear electro-optic coefficient r(51) close to those of bulk crystals. (C) 1995 American Institute of Physics.
引用
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页码:1836 / 1838
页数:3
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