DIRECT WRITING OF SUBMICRON METALLIC FEATURES WITH A SCANNING TUNNELING MICROSCOPE

被引：105

作者：

SILVER, RM

EHRICHS, EE

DELOZANNE, AL

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 04期

关键词：

D O I：

10.1063/1.98462

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：247 / 249

页数：3

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