THE PROPERTIES OF FILMS PREPARED BY THE RF SPUTTERING OF PTFE AND PLASMA POLYMERIZATION OF SOME FREONS

被引：43

作者：

BIEDERMAN, H

机构：

来源：

VACUUM | 1981年 / 31卷 / 07期

关键词：

D O I：

10.1016/S0042-207X(81)80498-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：285 / 289

页数：5

共 14 条

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[5]

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KAY, E .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (11) :5617-5623

[7] COMBINATION MOISTURE RESISTANT AND ANTIREFLECTION PLASMA POLYMERIZED THIN-FILMS FOR OPTICAL COATINGS [J].

HOLLAHAN, JR ;

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JOHNSON, CC .

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[8]

KAGANOWICZ G, 1979, P ISPC, V4, P152

[9] SWITCHING AND BREAKDOWN IN FILMS [J].

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[10]

LEE SM, 1971, INSUL CIRCUITS, P33

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