CHARACTERIZATION AND THERMAL-DESORPTION SPECTROSCOPY STUDY ON A NEW, LOW OUTGASSING MATERIAL SURFACE FOR IMPROVED ULTRAHIGH-VACUUM USES

被引：22

作者：

FUJITA, D

HOMMA, T

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 02期

关键词：

D O I：

10.1116/1.574986

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：230 / 234

页数：5

共 15 条

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