SINGLE-STEP BURIED WAVE-GUIDES IN GLASS BY FIELD-ASSISTED COPPER ION-EXCHANGE

被引：13

作者：

GEVORGYAN, SS

机构：

[1] Microwave Microelectronics Group, Department of Microelectronics Technology, V. I. Ulyanov (Lenin) Electrotechnical Institute, Prof. Popova 5, Leningrad

来源：

ELECTRONICS LETTERS | 1990年 / 26卷 / 01期

关键词：

Glass; Integrated optics; Optical waveguides;

D O I：

10.1049/el:19900025

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Symmetric profile buried waveguides can be fabricated in glass by single-step electromigration of Cu2+ions from thin solid films. The theory of this process is given. The controllable process needs a molten multi-ionic anode to keep the glass surface background composition unchanged. © 1990, The Institution of Electrical Engineers. All rights reserved.

引用

页码：38 / 39

页数：2

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