DEVELOPMENT OF HIGHLY STABLE SYNCHROTRON RADIATION SOURCE AT SORTEC

被引：7

作者：

KODAIRA, M

AWAJI, N

KISHIMOTO, T

USAMI, H

WATANABE, M

机构：

[1] SORTEC Corporation, Tsukuba-shi

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 11B期

关键词：

SYNCHROTRON RADIATION (SR) SOURCE; X-RAY LITHOGRAPHY; COMPACT SR SOURCE; FULL ENERGY INJECTION SYSTEM; BEAM LIFETIME; BEAM REFILLING; FLAT TOP OPERATION OF THE STORED BEAM CURRENT; DOSE (AMP.HOURS);

D O I：

10.1143/JJAP.30.3043

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The construction and the initial beam conditioning of a 1-GeV synchrotron radiation (SR) source facility at SORTEC Corporation were successfully completed in 1989. The regular operation for lithography experiments was started in April 1990, and highly stable operation has been maintained for over one year. At present, the beam lifetime with the stored beam of 200 mA has reached over 50 hours. Due to stable beam refilling into the storage ring, automatic operation for a constant level control of the stored beam current was also successfully confirmed. In this paper, performance of the SR source will be further discussed from the viewpoint of the industrial use of the SR source for X-ray lithography in terms of stable and flexible operation, operation efficiency, utilities and radiation safety.

引用

页码：3043 / 3047

页数：5

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