A COMPARATIVE-STUDY OF THE RADIO-FREQUENCY DISCHARGE IN GAS-MIXTURES OF HELIUM WITH FLUORINE, OXYGEN, NITROGEN, AND ARGON

被引：28

作者：

VASILE, MJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 05期

关键词：

D O I：

10.1063/1.328024

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2503 / 2509

页数：7

共 35 条

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