SURFACE MORPHOLOGIES PRODUCED BY ION MILLING ON ION-IMPLANTED 18CR8NI STEELS

被引：4

作者：

SINGER, IL

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期

关键词：

D O I：

10.1116/1.570718

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：175 / 178

页数：4

共 27 条

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SINGER, IL .

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[3]

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KNAPP, JA ;

PICRAUX, ST .

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HARTLEY, NEW .

[7] SURFACE STRESSES IN ION-IMPLANTED STEEL [J].

HARTLEY, NEW .

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[8]

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[9]

Hermanne N., 1970, Radiation Effects, V5, P203, DOI 10.1080/00337577008235022

[10]

Hirvonen J.K, 1980, ION IMPLANTATION