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MICROWAVE PLASMA CVD SYSTEM FOR THE FABRICATION OF THIN SOLID FILMS
被引:18
作者
:
KATO, I
论文数:
0
引用数:
0
h-index:
0
机构:
HOSEI UNIV,COLL ENGN,TOKYO 184,JAPAN
HOSEI UNIV,COLL ENGN,TOKYO 184,JAPAN
KATO, I
[
1
]
WAKANA, S
论文数:
0
引用数:
0
h-index:
0
机构:
HOSEI UNIV,COLL ENGN,TOKYO 184,JAPAN
HOSEI UNIV,COLL ENGN,TOKYO 184,JAPAN
WAKANA, S
[
1
]
HARA, S
论文数:
0
引用数:
0
h-index:
0
机构:
HOSEI UNIV,COLL ENGN,TOKYO 184,JAPAN
HOSEI UNIV,COLL ENGN,TOKYO 184,JAPAN
HARA, S
[
1
]
KEZUKA, H
论文数:
0
引用数:
0
h-index:
0
机构:
HOSEI UNIV,COLL ENGN,TOKYO 184,JAPAN
HOSEI UNIV,COLL ENGN,TOKYO 184,JAPAN
KEZUKA, H
[
1
]
机构
:
[1]
HOSEI UNIV,COLL ENGN,TOKYO 184,JAPAN
来源
:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
|
1982年
/ 21卷
/ 08期
关键词
:
D O I
:
10.1143/JJAP.21.L470
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:L470 / L472
页数:3
相关论文
共 3 条
[1]
GENERATION OF LARGE VOLUME MICROWAVE PLASMAS
BOSISIO, RG
论文数:
0
引用数:
0
h-index:
0
机构:
ECOLE POLYTECH MONTREAL, DEPT ELECT ENGN, MONTREAL, QUEBEC, CANADA
BOSISIO, RG
WERTHEIMER, MR
论文数:
0
引用数:
0
h-index:
0
机构:
ECOLE POLYTECH MONTREAL, DEPT ELECT ENGN, MONTREAL, QUEBEC, CANADA
WERTHEIMER, MR
WEISSFLOCH, CF
论文数:
0
引用数:
0
h-index:
0
机构:
ECOLE POLYTECH MONTREAL, DEPT ELECT ENGN, MONTREAL, QUEBEC, CANADA
WEISSFLOCH, CF
[J].
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS,
1973,
6
(07):
: 628
-
630
[2]
MICROWAVE DISCHARGE CAVITIES OPERATING AT 2450 MHZ
FEHSENFELD, FC
论文数:
0
引用数:
0
h-index:
0
FEHSENFELD, FC
EVENSON, KM
论文数:
0
引用数:
0
h-index:
0
EVENSON, KM
BROIDA, HP
论文数:
0
引用数:
0
h-index:
0
BROIDA, HP
[J].
REVIEW OF SCIENTIFIC INSTRUMENTS,
1965,
36
(03)
: 294
-
+
[3]
RADIAL-DISTRIBUTION OF EXCITED ATOMS IN A NEW COAXIAL LINE TYPE MICROWAVE CW DISCHARGE-TUBE
KATO, I
论文数:
0
引用数:
0
h-index:
0
机构:
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
KATO, I
TSUCHIDA, H
论文数:
0
引用数:
0
h-index:
0
机构:
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
TSUCHIDA, H
NAGAI, M
论文数:
0
引用数:
0
h-index:
0
机构:
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
NAGAI, M
[J].
JOURNAL OF APPLIED PHYSICS,
1980,
51
(10)
: 5312
-
5315
←
1
→
共 3 条
[1]
GENERATION OF LARGE VOLUME MICROWAVE PLASMAS
BOSISIO, RG
论文数:
0
引用数:
0
h-index:
0
机构:
ECOLE POLYTECH MONTREAL, DEPT ELECT ENGN, MONTREAL, QUEBEC, CANADA
BOSISIO, RG
WERTHEIMER, MR
论文数:
0
引用数:
0
h-index:
0
机构:
ECOLE POLYTECH MONTREAL, DEPT ELECT ENGN, MONTREAL, QUEBEC, CANADA
WERTHEIMER, MR
WEISSFLOCH, CF
论文数:
0
引用数:
0
h-index:
0
机构:
ECOLE POLYTECH MONTREAL, DEPT ELECT ENGN, MONTREAL, QUEBEC, CANADA
WEISSFLOCH, CF
[J].
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS,
1973,
6
(07):
: 628
-
630
[2]
MICROWAVE DISCHARGE CAVITIES OPERATING AT 2450 MHZ
FEHSENFELD, FC
论文数:
0
引用数:
0
h-index:
0
FEHSENFELD, FC
EVENSON, KM
论文数:
0
引用数:
0
h-index:
0
EVENSON, KM
BROIDA, HP
论文数:
0
引用数:
0
h-index:
0
BROIDA, HP
[J].
REVIEW OF SCIENTIFIC INSTRUMENTS,
1965,
36
(03)
: 294
-
+
[3]
RADIAL-DISTRIBUTION OF EXCITED ATOMS IN A NEW COAXIAL LINE TYPE MICROWAVE CW DISCHARGE-TUBE
KATO, I
论文数:
0
引用数:
0
h-index:
0
机构:
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
KATO, I
TSUCHIDA, H
论文数:
0
引用数:
0
h-index:
0
机构:
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
TSUCHIDA, H
NAGAI, M
论文数:
0
引用数:
0
h-index:
0
机构:
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
NAGAI, M
[J].
JOURNAL OF APPLIED PHYSICS,
1980,
51
(10)
: 5312
-
5315
←
1
→