PRECISE MEASUREMENT OF LEAKY SAW VELOCITY ON LITAO3-36-DEGREE-YX SUBSTRATES USING A COMB-FILTER METHOD

被引：3

作者：

YUHARA, A ^{[1
]}

HIRASHIMA, T ^{[1
]}

WATANABE, H ^{[1
]}

YAMADA, J ^{[1
]}

IWAMA, A ^{[1
]}

机构：

[1] HITACHI LTD,TOKAI WORKS,KATSUTA 312,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷

关键词：

D O I：

10.7567/JJAPS.28S1.114

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：114 / 116

页数：3

共 8 条

[1]

Hirabayashi M., 1988, Transactions of the Institute of Electronics, Information and Communication Engineers A, VJ71A, P587

[2]

NAKAMURA K, 1977, IEEE ULTR S P, P819

[3] DETERMINATION OF PHASE AND GROUP VELOCITIES OF DISPERSIVE WAVES IN SOLIDS [J].

SACHSE, W ;

PAO, YH .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (08) :4320-4327

[4] PRECISE MEASUREMENT OF SAW PROPAGATION VELOCITY ON LINBO3 [J].

TEMMYO, J ;

KOTAKA, I ;

INAMURA, T ;

YOSHIKAWA, S .

IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1980, 27 (04) :218-219

[5]

Williamson R.C., 1974, IEEE 1974 ULTRASONIC, P321, DOI [10.1109/ultsym.1974.196345, DOI 10.1109/ULTSYM.1974.196345]

[6] EFFECT OF LI/NB RATIO ON THE SAW VELOCITY OF 128-DEGREES Y-XLINBO3 WAFERS [J].

YAMADA, K ;

TAKEMURA, H ;

INOUE, Y ;

OMI, T ;

MATSUMURA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 :219-222

[7]

YUHARA A, 1980, IECE US8040 TECHN RE

[8]

YUHARA A, 1988, IEICE US8810 TECHN R

← 1 →