FILM FORMATION OF DITITANIUM NITRIDE BY THE DYNAMIC MIXING METHOD

被引：17

作者：

KIUCHI, M ^{[1
]}

FUJII, K ^{[1
]}

MIYAMURA, H ^{[1
]}

KADONO, K ^{[1
]}

SATOU, M ^{[1
]}

FUJIMOTO, F ^{[1
]}

机构：

[1] OSAKA UNIV,INST SCI & IND RES,IBARAKI,OSAKA 567,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷

关键词：

D O I：

10.1016/0168-583X(89)90278-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：701 / 703

页数：3

共 11 条

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[2] A NEW MACHINE FOR FILM FORMATION BY ION AND VAPOR-DEPOSITION [J].

ANDOH, Y ;

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[3] FORMATION OF MOLYBDENUM NITRIDE FILMS BY ION-BEAM AND VAPOR-DEPOSITION METHOD [J].

FUJIMOTO, F ;

NAKANE, Y ;

SATOU, M ;

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ANDOH, Y .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :791-796

[4] TITANIUM NITRIDE CRYSTAL-GROWTH WITH PREFERRED ORIENTATION BY DYNAMIC MIXING METHOD [J].

KIUCHI, M ;

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[5]

KIUCHI M, 1988, NUCL INSTRUM METH B, V33, P649

[6] NITRIDE FILM FORMATION BY ION AND VAPOR-DEPOSITION [J].

SATOU, M ;

YAMAGUCHI, K ;

ANDOH, Y ;

SUZUKI, Y ;

MATSUDA, K ;

FUJIMOTO, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :910-914

[7] COATING FILMS OF TITANIUM NITRIDE PREPARED BY ION AND VAPOR-DEPOSITION METHOD [J].

SATOU, M ;

ANDOH, Y ;

OGATA, K ;

SUZUKI, Y ;

MATSUDA, K ;

FUJIMOTO, F .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (06) :656-660

[8] FORMATION OF CUBIC BORON-NITRIDE FILMS BY BORON EVAPORATION AND NITROGEN ION-BEAM BOMBARDMENT [J].

SATOU, M ;

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[9]

SATOU M, 1981, P INT WORKSHOP PROFE, P349

[10]

SATOU M, 1982, 6TH P S ION SOURC IO, P425

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