DYNAMIC IMAGING MICROELLIPSOMETRY - PROOF OF CONCEPT TEST-RESULTS

被引：14

作者：

COHN, RF ^{[1
]}

WAGNER, JW ^{[1
]}

KRUGER, J ^{[1
]}

机构：

[1] JOHNS HOPKINS UNIV,DEPT MAT SCI & ENGN,BALTIMORE,MD 21218

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 04期

关键词：

ALUMINUM AND ALLOYS - Measurements - COPPER AND ALLOYS - Measurements - OPTICAL INSTRUMENTS - Applications - SEMICONDUCTING SILICON - Measurements;

D O I：

10.1149/1.2095766

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Dynamic Imaging Microellipsometry (DIM) is a rapid full-field imaging technique developed for high spatial resolution that will enable studies of passive film changes occurring during breakdown at localized sites. A technique has been developed where the surface can be measured by arbitrarily arranged arrays of optical detectors. To demonstrate the feasibility of the DIM concept, the results from two fundamental tests are presented.

引用

页码：1033 / 1034

页数：2