PROBLEMS OF STRUCTURE EVOLUTION IN POLYCRYSTALLINE FILMS - CORRELATIONS BETWEEN GRAIN MORPHOLOGY AND TEXTURE FORMATION MECHANISMS

被引:19
作者
ADAMIK, M
BARNA, PB
TOMOV, I
BIRO, D
机构
[1] BULGARIAN ACAD SCI,INST PHYS CHEM,BU-1113 SOFIA,BULGARIA
[2] TECH UNIV TIRGU MURES,TIRGU MURES,ROMANIA
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1994年 / 145卷 / 02期
关键词
D O I
10.1002/pssa.2211450207
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A correlation is revealed between texture, grain morphology, and impurity content in polycrystalline Al films. The [111] texture at low contamination level develops by restructuration while in the case of mixed [111] and [100] textures the [111] part develops by restructuration and the [110] part by competitive growth controlled by impurities.
引用
收藏
页码:275 / 281
页数:7
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