ARTIFACTS OF SPECIMEN CHARGING IN X-RAY-MICROANALYSIS IN THE SCANNING ELECTRON-MICROSCOPE

被引：2

作者：

MILLER, DJ

机构：

[1] Materials Science Division, Argonne National Laboratory, Argonne

来源：

ULTRAMICROSCOPY | 1991年 / 35卷 / 3-4期

关键词：

D O I：

10.1016/0304-3991(91)90088-N

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

The effects of charging of uncoated, highly resistive samples on energy-dispersive X-ray spectra are examined. It is observed that as sample charging increases, the continuum background and characteristic peaks at higher X-ray energies diminish. Modelling of the continuum background has allowed this effect to be related to the development of a surface potential on the sample. This potential reduces the effective accelerating voltage of the electrons and results in a decreased overvoltage necessary for excitation of higher-energy X-rays. This artifact may lead to erroneous results in compositional analysis based on such charging-affected spectra. However, it is observed that many highly resistive samples of practical interest may be accurately analyzed without coating when only a small potential is developed.

引用

页码：357 / 366

页数：10

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