QUANTIFICATION IN LOW-ENERGY ION-SCATTERING - ELEMENTAL SENSITIVITY FACTORS AND CHARGE-EXCHANGE PROCESSES

被引：43

作者：

MIKHAILOV, SN

ELFRINK, RJM

JACOBS, JP

VANDENOETELAAR, LCA

SCANLON, PJ

BRONGERSMA, HH

机构：

[1] EINDHOVEN UNIV TECHNOL,FAC PHYS,N-LAAG,POB 513,5600 MB EINDHOVEN,NETHERLANDS

[2] EINDHOVEN UNIV TECHNOL,SCHUIT INST CATALYSIS,5600 MB EINDHOVEN,NETHERLANDS

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 93卷 / 02期

关键词：

D O I：

10.1016/0168-583X(94)95680-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

For quantitative analysis in Low Energy Ion Scattering (LEIS), elemental sensitivity factors are needed. Here, these factors are presented for 1 keV He+ scattering from a number of pure metals. The influence of different properties of the target on neutralization of the incident ions has been studied and elemental specific neutralization constants (characteristic velocities) have been measured. An enhanced neutralization was found for elements for which ionization plays an important role. A qualitative explanation is given for this observation.

引用

页码：149 / 155

页数：7

共 25 条

[1] INELASTIC PROCESSES IN ION-SCATTERING SPECTROSCOPY OF SOLID-SURFACES [J].