TEMPERATURE SENSITIVE ION-IMPLANTED POLYMER-FILMS

被引：13

作者：

GIEDD, RE ^{[1
]}

MOSS, MG ^{[1
]}

CRAIG, MM ^{[1
]}

ROBERTSON, DE ^{[1
]}

机构：

[1] BREWER SCI INC,ROLLA,MO 65401

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 59卷 / pt 2期

关键词：

D O I：

10.1016/0168-583X(91)95805-N

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The electrical resistivity of polymer films changes four or five orders of magnitude after ion implantation. The temperature coefficient of resistance, alpha, is very large and negative [R.E. Giedd, J. Shipman and M. Murphy, Mater. Res. Soc. Symp. Proc. 147 (1989)]. This large alpha suggests that these materials might make useful precision temperature transducers and we have characterized them for use in this manner. A number of polyacrylonitrile (PAN) type polymers were chosen because of their characteristic of decreasing in resistivity after pyrolysis. We found that the material most suitable for this application was PAN implanted with boron to a fluence of 1 x 10(17) ions/cm2 with a beam energy of 50 keV and a beam current of 300-mu-A. Our results indicated a stable resistivity from 60 to 400 K as well as a good surface morphology for the manufacture of small temperature sensors.

引用

页码：1253 / 1256

页数：4

共 8 条

[1] HOPPING CONDUCTIVITY IN DISORDERED SYSTEMS [J].