ELECTRON-OPTICAL PROPERTIES OF A QUADRUPOLE QUADRUPLET PROJECTOR LENS

被引：10

作者：

KAWAKATSU, H

VOSBURGH, KG

SIEGEL, BM

机构：

[1] Department of Engineering Physics, Cornell University, Ithaca, NY

来源：

JOURNAL OF APPLIED PHYSICS | 1968年 / 39卷 / 01期

关键词：

D O I：

10.1063/1.1655740

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A magnetic quadrupole quadruplet projector system has been designed, built, and studied, which has excellent characteristics for high-resolution and high-energy electron microscopes. The focal length is continuously variable from 0.7 mm to 3.6 mm by adjusting two current supplies. The third-order distortion aberrations and first-order chromatic aberration were calculated using measured field distributions. These aberrations change very little over the whole range of focal lengths and are always lower than these aberrations in the best set of rotationally symmetric lenses designed to cover this range of focal lengths. © 1968 The American Institute of Physics.

引用

页码：245 / +

页数：1

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