FERROELECTRIC PBTIO3 THIN-FILMS AND THEIR APPLICATION

被引：42

作者：

OKUYAMA, M

HAMAKAWA, Y

机构：

[1] Department of Electrical Engineering, Faculty of Engineering Science, Osaka University, Toyonaka, Osaka

来源：

INTERNATIONAL JOURNAL OF ENGINEERING SCIENCE | 1991年 / 29卷 / 03期

关键词：

D O I：

10.1016/0020-7225(91)90159-Z

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A series of technical data for preparing PbTiO3 and its related thin films by using various methods such as rf sputtering and chemical vapor deposition are described. The obtained thin films show very good ferroelectric, pyroelectric, piezoelectric and c-axis-oriented or epitaxial films have better properties. These films have been applied to various electronic devices such as nonvolatile memory FET, infrared-sensitive IR-OPFET, infrared imaging, Si-monolithic ultrasonic sensor, light modulator and switches.

引用

页码：391 / 400

页数：10

共 41 条

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