共 13 条
[1]
Ohmi, Microelectron. Eng., 10, (1991)
[2]
Iscoff, Semicond. Int., (1991)
[3]
Hoenig, Particles on Surfaces, 1, (1988)
[4]
Zapka, Ziemlich, Tam, Appl. Phys. Lett., 58, (1991)
[5]
Tam, Leung, Zapka, Ziemlich, J. Appl. Phys., 71, (1992)
[6]
Mittal, Particles on Surfaces, 1, (1988)
[7]
Mittal, Particles on Surfaces, 2, (1989)
[8]
Kelley, Stuff, Hovis, Linford, SPIE Proc., 1415, (1991)
[9]
Imen, Lee, Allen, Appl. Phys. Lett., 58, (1991)
[10]
Zapka, Sonchik, Behringer, Haug, Meissner, Silverman, Ziemlich, Bohlen, Smith, Mix-and-match EBP/optical lithography of 1 Mbit chips, Microelectronic Engineering, 13, (1991)