AN INVESTIGATION OF THE CHEMISTRY OF THE DIELECTRIC FECOTB INTERFACE BY X-RAY PHOTOELECTRON-SPECTROSCOPY AND AUGER-ELECTRON SPECTROSCOPY

被引：7

作者：

STICKLE, WF ^{[1
]}

COULMAN, D ^{[1
]}

机构：

[1] HEWLETT PACKARD LABS,PALO ALTO,CA 94034

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574815

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1128 / 1131

页数：4

共 11 条

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[10]

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