SCANNING AUGER-ELECTRON MICROSCOPY

被引：4

作者：

BROWNING, R

PRUTTON, M

机构：

[1] Department of Physics, University of York, Heslington

来源：

PHYSICS IN TECHNOLOGY | 1979年 / 10卷 / 06期

关键词：

D O I：

10.1088/0305-4624/10/6/I02

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Scanning electron microscopes are now being developed to investigate the spatial distribution of chemical elements in the top few atomic layers of solids. Instruments using the Auger process are discussed here, as well as some applications to metallurgy and microelectronics.

引用

页码：259 / 265

页数：7

共 7 条

[1] Crewe AV, Eggenburger DN, Wall J, Welter LM, Rev. Sci. Instrum., 39, 4, pp. 576-583, (1968)
[2] Janssen AP, Venables JA, Hwang JCM, Balluffi RW, Direct observation of grain-boundary diffusion by scanning Auger microscopy, Philosophical Magazine, 36, 6, pp. 1537-1540, (1977)
[3] Kirschner J, Appl. Phys., 14, 4, (1977)
[4] Seah MP, Hondros ED, Grain Boundary Segregation, Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, 335, 1601, pp. 191-212, (1973)
[5] van Oostrom A, Surf. Sci., (1979)
[6] Venables JA, Janssen AP, Harland CJ, Joyce BA, Phil. Mag., 34, 3, pp. 495-500, (1976)
[7] Wells OC, (1974)

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