QUANTITATIVE AUGER-ELECTRON SPECTROSCOPY OF TISI-GAMMA - PEAK HEIGHT, LINE-SHAPE, AND SPUTTERING YIELD ANALYSES

被引：11

作者：

GALUSKA, AA

WALLACE, WO

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 01期

关键词：

D O I：

10.1116/1.575739

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：9 / 16

页数：8

共 27 条

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