FABRICATION OF CAPACITIVE ACCELERATION SENSORS BY THE LIGA TECHNIQUE

被引：28

作者：

BURBAUM, C ^{[1
]}

MOHR, J ^{[1
]}

BLEY, P ^{[1
]}

EHRFELD, W ^{[1
]}

机构：

[1] STEAG AG,UNTERNEHMENSBEREICH MIKROTECH,W-7500 KARLSRUHE 21,GERMANY

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1991年 / 27卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(91)87051-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

By combination of the LIGA (German Acronym for Lithografie, Galvanoformung, Abformung) process with a sacrificial layer technique, movable microstructures with great structural heights can be fabricated. As a first example, a movable mass suspended on a cantilever which can be used as a capacitive acceleration sensor is presented. Calculation of the sensor characteristics shows that a capacitor gap width of 3-mu-m is needed. This capacitor has been fabricated up to a height of more than 100-mu-m. The movability of these microstructures is demonstrated by applying electrical and magnetic fields.

引用

页码：559 / 563

页数：5

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