Formation of titania particles by vapor-phase oxidation of titanium tetrachloride was studied in an aerosol reactor between 1,200 and 1,723 K. The effect of process variables (reactor residence time, temperature, and reactant concentration) on powder size and phase characteristics was investigated using the differential mobility particle sizer, scanning electron microscopy, and X-ray diffraction. Titania particles were primarily anatase though the rutile weight fraction increased with increasing reactor temperature. The geometric number average diameter of the particles was between 0.13 and 0.35-mu-m, and the geometric standard deviation of the particle size distribution was about 1.4. The average particle size increased with increasing temperature, inlet TiCl4 concentration, and residence time. The observed changes in the particle size distribution were compared with those predicted by solving the aerosol dynamic equation by a sectional method and accounting for coagulation and first-order chemical reaction. While variations in the process variables resulted in discernible changes in the size of the particles, the spread of the distribution remained rather unaffected.