SCANNING ACOUSTIC MICROSCOPY

被引：42

作者：

KHURIYAKUB, BT

机构：

[1] Edward L. Ginzton Laboratory, Stanford University, Stanford

来源：

ULTRASONICS | 1993年 / 31卷 / 05期

关键词：

SCANNING ACOUSTIC MICROSCOPY; IMAGING; MATERIAL CHARACTERIZATION;

D O I：

10.1016/0041-624X(93)90070-G

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Acoustic microscopy is a well-established and useful technique for imaging and investigating the properties of materials such as metals, ceramics and composites, as well as integrated circuits and biological samples. This article covers the scanning acoustic microscope (SAM), explains its operating principle and the various system configurations available. Various applications are covered, including biological applications, integrated circuits, composite materials and metrology.

引用

页码：361 / 372

页数：12

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