PZT-POLYMER COMPOSITES FABRICATED WITH YAG LASER CUTTER

Piezoelectric composites have been constructed by YAG laser cutting of PZT ceramics and back-filling with silicone rubber. Composites containing 46-76 vol.% PZT have been prepared with several different rod sizes. The measured dielectric constant ranges from 310 to 598, d33 from 297 to 305 pC/N, and g33 from 87 X 10(-3) to 62 x 10(-3) V m/N. The influence of the new fabrication method on the piezoelectric properties of the composite is evaluated, and it is confirmed that an elastomer with low elastic modulus increases g33 and suppresses the radial mode vibration in resonance. For the PZT-silicone rubber composites made by YAG laser cutting, g33 can be enhanced in 1-3 composites to about three times the value for solid PZT. The piezoelectric properties are compared with those of 1-3 composites made by ultrasonic cutting. The g33 values of composites fabricated by ultrasonic cutting are larger than those fabricated by laser cutting. These results indicate that to get higher values of g33 it is necessary to perforate PZT with ditches of the same width.