CALCULATION OF THE CURRENT-VOLTAGE-PRESSURE CHARACTERISTICS OF DC DIODE SPUTTERING DISCHARGES

[1] Aston FW, 1907, P R SOC LOND A-CONTA, V79, P80, DOI 10.1098/rspa.1907.0016

[2] STRUCTURAL AND ELECTRICAL PROPERTIES OF FILMS SPUTTERED FROM A PT CATHODE IN ARGON-OXYGEN MIXTURES [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (02) : 558 - 567

[3] COBINE JD, 1958, GASEOUS CONDUCTORS, P225

[4] ION ENERGIES AT CATHODE OF A GLOW DISCHARGE [J]. PHYSICAL REVIEW, 1963, 131 (01): : 219 - &

[5] FORMAN R, 1961, PHYS REV, V123, P1573

[6] AUGER EJECTION OF ELECTRONS FROM MOLYBDENUM BY NOBLE GAS IONS [J]. PHYSICAL REVIEW, 1956, 104 (03): : 672 - 683

[7] INGOLD JH, 1969, J APPL PHYS, V40, P55, DOI [10.1063/1.1657102, 10.1063/1.1657103]

[8] INGOLD JH, 1978, GASEOUS ELECTRONICS, V1

[9] INGOLD JH, 1969, J APPL PHYS, V40, P62

[10] DISCHARGE CHARACTERISTICS FOR MAGNETRON SPUTTERING OF AL IN AR AND AR-O-2 MIXTURES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (03): : 743 - 751

[1] Aston FW, 1907, P R SOC LOND A-CONTA, V79, P80, DOI 10.1098/rspa.1907.0016

[2] STRUCTURAL AND ELECTRICAL PROPERTIES OF FILMS SPUTTERED FROM A PT CATHODE IN ARGON-OXYGEN MIXTURES [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (02) : 558 - 567

[3] COBINE JD, 1958, GASEOUS CONDUCTORS, P225

[4] ION ENERGIES AT CATHODE OF A GLOW DISCHARGE [J]. PHYSICAL REVIEW, 1963, 131 (01): : 219 - &

[5] FORMAN R, 1961, PHYS REV, V123, P1573

[6] AUGER EJECTION OF ELECTRONS FROM MOLYBDENUM BY NOBLE GAS IONS [J]. PHYSICAL REVIEW, 1956, 104 (03): : 672 - 683

[7] INGOLD JH, 1969, J APPL PHYS, V40, P55, DOI [10.1063/1.1657102, 10.1063/1.1657103]

[8] INGOLD JH, 1978, GASEOUS ELECTRONICS, V1

[9] INGOLD JH, 1969, J APPL PHYS, V40, P62

[10] DISCHARGE CHARACTERISTICS FOR MAGNETRON SPUTTERING OF AL IN AR AND AR-O-2 MIXTURES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (03): : 743 - 751