CALCULATION OF THE CURRENT-VOLTAGE-PRESSURE CHARACTERISTICS OF DC DIODE SPUTTERING DISCHARGES

被引:26
作者
MANIV, S
WESTWOOD, WD
SCANLON, PJ
机构
[1] BELL NO RES,OTTAWA K1Y 4H7,ONTARIO,CANADA
[2] QUEENS UNIV,DEPT PHYS,KINGSTON K7L 3N6,ONTARIO,CANADA
关键词
D O I
10.1063/1.330550
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:856 / 860
页数:5
相关论文
共 15 条
  • [1] Aston FW, 1907, P R SOC LOND A-CONTA, V79, P80, DOI 10.1098/rspa.1907.0016
  • [2] STRUCTURAL AND ELECTRICAL PROPERTIES OF FILMS SPUTTERED FROM A PT CATHODE IN ARGON-OXYGEN MIXTURES
    BENNEWITZ, CD
    WESTWOOD, WD
    BROWN, JD
    [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (02) : 558 - 567
  • [3] COBINE JD, 1958, GASEOUS CONDUCTORS, P225
  • [4] ION ENERGIES AT CATHODE OF A GLOW DISCHARGE
    DAVIS, WD
    VANDERSLICE, TA
    [J]. PHYSICAL REVIEW, 1963, 131 (01): : 219 - &
  • [5] FORMAN R, 1961, PHYS REV, V123, P1573
  • [6] AUGER EJECTION OF ELECTRONS FROM MOLYBDENUM BY NOBLE GAS IONS
    HAGSTRUM, HD
    [J]. PHYSICAL REVIEW, 1956, 104 (03): : 672 - 683
  • [7] INGOLD JH, 1969, J APPL PHYS, V40, P55, DOI [10.1063/1.1657102, 10.1063/1.1657103]
  • [8] INGOLD JH, 1978, GASEOUS ELECTRONICS, V1
  • [9] INGOLD JH, 1969, J APPL PHYS, V40, P62
  • [10] DISCHARGE CHARACTERISTICS FOR MAGNETRON SPUTTERING OF AL IN AR AND AR-O-2 MIXTURES
    MANIV, S
    WESTWOOD, WD
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (03): : 743 - 751