TEMPORAL EVOLUTION OF COLLISIONLESS SHEATHS

被引:52
作者
CHO, MH
HERSHKOWITZ, N
INTRATOR, T
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 05期
关键词
D O I
10.1116/1.575462
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2978 / 2986
页数:9
相关论文
共 55 条
[1]   TRANSIENT PLASMA SHEATH - DISCOVERED BY ION-ACOUSTIC WAVES [J].
ALEXEFF, I ;
JONES, WD ;
LONNGREN, K ;
MONTGOMERY, D .
PHYSICS OF FLUIDS, 1969, 12 (02) :345-+
[2]   SHEATH GROWTH IN A LOW PRESSURE PLASMA [J].
ANDREWS, JG ;
VAREY, RH .
PHYSICS OF FLUIDS, 1971, 14 (02) :339-&
[3]   STRUCTURE OF RF PARALLEL-PLATE DISCHARGES [J].
BLETZINGER, P ;
DEJOSEPH, CA .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1986, 14 (02) :124-131
[4]  
Bohm D, 1949, CHARACTERISTICS ELEC
[5]  
Brown S.C., 1967, BASIC DATA PLASMA PH
[6]   PLASMA SHEATH FORMATION BY RADIO-FREQUENCY FIELDS [J].
BUTLER, HS ;
KINO, GS .
PHYSICS OF FLUIDS, 1963, 6 (09) :1346-1355
[7]  
Chapman B., 1980, GLOW DISCHARGE PROCE
[8]  
CHAPMAN B, 1985, APPLICATION PLASMA P
[9]  
CHAPMAN B, 1982, DEPOSITION TECHNOLOG
[10]  
CHEN FF, 1964, PLASMA DIAGNOSTIC TE, pCH4