X-RAY-LITHOGRAPHY AT THE VEPP-3 STORAGE RING

被引：14

作者：

ARTAMONOVA, LD ^{[1
]}

GENTSELEV, AN ^{[1
]}

DEIS, GA ^{[1
]}

KRASNOPEROVA, AA ^{[1
]}

MIKHALYOV, EV ^{[1
]}

PROKOPENKO, VS ^{[1
]}

KULIPANOV, GN ^{[1
]}

MEZENTSEVA, LA ^{[1
]}

PINDYURIN, VF ^{[1
]}

机构：

[1] INST NUCL PHYS,NOVOSIBIRSK 630090,USSR

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.1142656

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The paper deals with an x-ray lithography station at the VEPP-3 storage ring of the Institute of Nuclear Physics (Novosibirsk) and some recent results are reported. The utilization of rather high quantum energies is shown not to deteriorate the quality of x-ray replication. The presented work is an extension of the studies that were performed at VEPP-2M [E. S. Gluskin, A. A. Krasnopyorova, G. N. Kulipanov, V. P. Naz'mov, V. F. Pindyurin, A. N. Skrinsky, and V. V. Chesnokov, Nucl. Instrum. Methods 208, 393 (1983)].

引用

页码：764 / 766

页数：3