INVESTIGATION OF HOLLOW-CATHODE EFFECTS ON STRUCTURE OF BULK FILMS

被引:12
作者
STOWELL, WR [1 ]
CHAMBERS, D [1 ]
机构
[1] BATTELLE MEM INST,COLUMBUS LAB,505 KING AVE,COLUMBUS,OH 43201
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 04期
关键词
D O I
10.1116/1.1312729
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:653 / 656
页数:4
相关论文
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    LITTLE, PF
    VONENGEL, A
    [J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1954, 224 (1157): : 209 - 227
  • [3] MATTOX DM, 1973, SPUTTER DEPOSITION I
  • [4] WAN CT, 1973, 4 P INT C VAC MET TO
  • [5] 1972, SP5111 NASA