VELOCITY AND SIZE DEPENDENCES OF THE EROSION RATE IN SILICON

被引:30
作者
SCATTERGOOD, RO
ROUTBORT, JL
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D O I
10.1016/0043-1648(81)90106-X
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
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页码:227 / 232
页数:6
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