共 24 条
[1]
BERNETT M, 1960, J PHYS CHEM-US, V64, P1229
[3]
Cherry B. W, 1981, POLYM SURFACES
[4]
DEAN JA, 1985, LANGES HDB CHEM
[5]
PLASMA-ETCHING OF ORGANIC MATERIALS .1. POLYIMIDE IN O2-CF4
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1985, 3 (03)
:893-904
[6]
FOX W, 1940, J COLLOID SCI, V5, P514
[7]
GOOD R, 1964, CONTACT ANGLE WETTAB, V43
[8]
JARVIS N, 1964, CONTACT ANGLE WETTAB, V43
[9]
LEARY HJ, 1981, ACS SYM SER, V162, P419
[10]
NF3 PLASMA TREATMENT OF POLYMERIC DIELECTRICS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1992, 10 (03)
:450-454