RIGOROUS TREATMENT OF THE ELECTROSTATIC IMMERSION LENS WHOSE AXIAL POTENTIAL DISTRIBUTION IS GIVEN BY -PHI-(Z)=PHI-OEK-ARCTAW-Z

被引:15
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HUTTER, RGE
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10.1063/1.1707523
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O59 [应用物理学];
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页码:678 / 699
页数:22
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